STUDY OF ATOMIC EXCITATION IN SPUTTERING AS A FUNCTION OF THE PROJECTILE INCIDENCE ANGLE

被引：23

作者：

LARSEN, P

VEJE, E

机构：

来源：

PHYSICAL REVIEW B | 1983年 / 28卷 / 09期

关键词：

D O I：

10.1103/PhysRevB.28.5011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：5011 / 5018

页数：8

共 15 条

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