DESIGN CONSIDERATIONS FOR THE THERMAL ACCELEROMETER

被引:17
作者
HIRATSUKA, R [1 ]
VANDUYN, DC [1 ]
OTAREDIAN, T [1 ]
DEVRIES, P [1 ]
SARRO, PM [1 ]
机构
[1] DELFT UNIV TECHNOL,DIMES,2600 GB DELFT,NETHERLANDS
关键词
D O I
10.1016/0924-4247(92)80016-V
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents some design and optimization aspects of the thermal accelerometer. The design and optimization strategy is based on a one-dimensional model describing both the thermal and mechanical properties of the device. It is shown that this model is reasonably in agreement with experiments carried out on some prototype devices. The performance optimization criteria are based on the `maximally flat amplitude response' from which the optimum design parameters can be calculated for a given bandwidth.
引用
收藏
页码:380 / 385
页数:6
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