SILICIDE SILICON INTERFACE BONDING

被引：2

作者：

RUBLOFF, GW

机构：

来源：

ULTRAMICROSCOPY | 1984年 / 14卷 / 1-2期

关键词：

D O I：

10.1016/0304-3991(84)90114-1

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：107 / 119

页数：13

共 53 条

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