EFFECT OF LOW-INTENSITY LASER-RADIATION DURING OXIDATION OF THE GAAS(110) SURFACE

被引:50
作者
PETRO, WG
HINO, I
EGLASH, S
LINDAU, I
SU, CY
SPICER, WE
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 02期
关键词
D O I
10.1116/1.571665
中图分类号
O59 [应用物理学];
学科分类号
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页码:405 / 408
页数:4
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