NUCLEATION AND GROWTH OF PLATINUM AND NICKEL FILMS ON AMORPHOUS-CARBON SUBSTRATES

被引:17
作者
EVANS, BL
MAAROOF, AI
XU, S
机构
[1] J. J. Thomson Physical Laboratory, University of Reading, Box 220, Reading, Berks RG6 2AF, Whiteknights
关键词
D O I
10.1063/1.357767
中图分类号
O59 [应用物理学];
学科分类号
摘要
The nucleation and growth of Pt and Ni films deposited on amorphous carbon (a-C) substrates by ion-beam sputtering (IBS) have been followed from an early stage through to complete substrate coverage. The influence of IBS parameters and substrate temperature T(s) on deposition rate and metal particle (island) size distributions have been measured. Metal island growth is shown to be predominantly two dimensional in character. Soft-x-ray reflectivity measurements on Ni/a-C multilayers detect the single atom layer increments in Ni island thickness t(Ni)' during growth from the initial (critical) value t(Ni)' = 0.87 nm which is consistent with a theoretical 22 atom cluster model. The influence of the metal island growth stages on the soft-x-ray reflectivity of multilayer mirrors is considered.
引用
收藏
页码:900 / 907
页数:8
相关论文
共 33 条
[1]  
AHMAD AK, COMMUNICATION
[2]  
ANDERSON HH, 1981, SPUTTERING PARTICLE, P176
[3]  
[Anonymous], SITZ BER AKAD WI MNW
[4]   OBERFLACHENSTRUKTUREN UND KRISTALLBAUFEHLER IM ELEKTRONENMIKROSKOPISCHEN BILD, UNTERSUCHT AM NACL .1. [J].
BETHGE, H .
PHYSICA STATUS SOLIDI, 1962, 2 (01) :3-27
[5]  
BLACHERE JR, 1984, MATER SCI, V19, P1202
[6]   ANALYSIS OF ISLAND-SIZE DISTRIBUTIONS IN ULTRATHIN METALLIC-FILMS [J].
BLACKMAN, JA ;
EVANS, BL ;
MAAROOF, AI .
PHYSICAL REVIEW B, 1994, 49 (19) :13863-13873
[7]  
BLACKMAN JA, 1992, P ISCMP VARNA
[8]  
BOHER P, 1992, SPIE P, V1742, P331
[9]  
Evans B. L., 1991, J MOD OPTIC, V38, P1631
[10]   THE INFLUENCE OF DISLOCATIONS ON CRYSTAL GROWTH [J].
FRANK, FC .
DISCUSSIONS OF THE FARADAY SOCIETY, 1949, (05) :48-54