Sensor based registration and stacking of electronic substrate layers

被引:5
作者
Brennemann, AE
Hammer, R
Jecusco, WV
Hollis, RL
机构
[1] VATELL CORP,CHRISTIANSBURG,VA 24073
[2] STRATASYS INC,HAWTHORNE,NY 10532
[3] CARNEGIE MELLON UNIV,PITTSBURGH,PA 15213
[4] IBM CORP,DIV RES,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY
关键词
D O I
10.1109/100.476627
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This sensor-based approach for registration and stacking of electronic substrate sublaminates replaces pin-in-slot methods, yet does not require accurate automation equipment. Tests of a pilot workcell for this approach showed that the contact holes were consistently aligned to 2.5 mu m (3 sigma), more than ten times better than the traditional mechanical method.
引用
收藏
页码:30 / 35
页数:6
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