MINIATURE PRESSURE SENSORS AND THEIR TEMPERATURE COMPENSATION

被引:23
作者
KOWALSKI, G
机构
[1] Philips GmbH, Hamburg, West Ger, Philips GmbH, Hamburg, West Ger
来源
SENSORS AND ACTUATORS | 1987年 / 11卷 / 04期
关键词
BRIDGE RESISTANCE - MINIATURE PRESSURE SENSORS - TRIMMED SENSORS;
D O I
10.1016/0250-6874(87)80076-8
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:367 / 376
页数:10
相关论文
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GERMER, W ;
TODT, W .
SENSORS AND ACTUATORS, 1983, 4 (02) :183-189
[3]  
GERMER W, 1986, SENSORS 1986, P4
[4]  
Keitel G., 1984, Electronic Components & Applications, V6, P149
[5]  
KOWALSKI G, 1984, 11TH INT C MICR MUN, P619
[6]  
TIETZE U, 1978, HALBLEITERSCHALTUNGS