THE MEASUREMENT OF EFFECTIVE COMPLEX REFRACTIVE-INDEXES FOR SELECTED METAL SILICIDES

被引:19
作者
FRAMPTON, RD [1 ]
IRENE, EA [1 ]
DHEURLE, FM [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.336578
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:978 / 980
页数:3
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