MORPHOLOGICAL-STUDY OF AG, IN, SB, AND BI OVERLAYERS ON GAAS(100)

被引:32
作者
SPINDT, CJ [1 ]
CAO, R [1 ]
MIYANO, KE [1 ]
LINDAU, I [1 ]
SPICER, WE [1 ]
PAO, YC [1 ]
机构
[1] VARIAN ASSOCIATES INC,PALO ALTO,CA 94303
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 04期
关键词
D O I
10.1116/1.584951
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:974 / 979
页数:6
相关论文
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