STRUCTURE AND PROPERTIES OF CARBON-FILMS PREPARED BY PULSED VACUUM-ARC DEPOSITION

Diamond-like carbon films prepared by the pulsed vacuum are discharge method are characterized by high growth rates and large coating areas. The films obtained demonstrate good adhesion to different substrate materials, continuity for small thicknesses, high microhardness and electric resistivity as well as low impurity content. Analysis of the films' structure and phase composition has shown that, depending on the deposition conditions, the structure in the short-range order varies considerably and corresponds to that of diamond, carbyne and graphite crystals. It is found that the non-homogeneity of the plasmoid density and composition results in structural non-uniformities in the film microstructure. Electrical, mechanical and optical properties of the films correlate with the short-range structural order. It is shown that the proposed method of film condensation allows effective control of the film properties and structure as well as good reproducibility of the required properties, which is particularly useful in industrial applications.