A COMPARISON OF PLASMA IMMERSION ION-IMPLANTATION WITH CONVENTIONAL ION-IMPLANTATION

被引：13

作者：

KENNY, MJ ^{[1
]}

WIELUNSKI, LS ^{[1
]}

TENDYS, J ^{[1
]}

COLLINS, GA ^{[1
]}

机构：

[1] ANSTO,MENAI,NSW,AUSTRALIA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 80-1卷

关键词：

D O I：

10.1016/0168-583X(93)96120-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Plasma immersion ion implantation has a potential advantage over conventional line-of-sight ion implantation in being able to provide a uniform dose over a nonplanar surface. Operating regimes are different for each process leading to different surface modification characteristics. Comparisons have been made of the two techniques for mild steel, tungsten carbide and graphitic carbons. For nitrogen implanted mild steel, the PI3 process gives a nitrogen depth distribution at least an order of magnitude greater than in CI2. In graphitic carbons, CI2 is more effective in producing radiation damage and improving resistance to wear.

引用

页码：262 / 266

页数：5

共 9 条

[1] COMPARISON BETWEEN CONVENTIONAL AND PLASMA SOURCE ION-IMPLANTED FEMORAL KNEE COMPONENTS [J].