EFFECT OF THE H2O/TEOS RATIO UPON THE PREPARATION AND NITRIDATION OF SILICA SOL-GEL FILMS

被引：40

作者：

GLASER, PM

PANTANO, CG

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1984年 / 63卷 / 1-2期

关键词：

D O I：

10.1016/0022-3093(84)90400-9

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：209 / 221

页数：13

相关论文

共 9 条

[1] BRINKER CJ, 1982, J AM CERAM SOC, V65, pC4, DOI 10.1111/j.1151-2916.1982.tb09926.x
[2] SOL-GEL TRANSITION IN SIMPLE SILICATES
BRINKER, CJ
KEEFER, KD
SCHAEFER, DW
ASHLEY, CS
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1982, 48 (01) : 47 - 64
[3] DEHYDROXYLATION OF POROUS-GLASS BY MEANS OF CHLORINE
ELMER, TH
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1981, 64 (03) : 150 - 154
[4] NITRIDATION OF SILICON AND OXIDIZED-SILICON
HAYAFUJI, Y
KAJIWARA, K
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (09) : 2102 - 2108
[5] DIRECT THERMAL NITRIDATION OF SILICON DIOXIDE FILMS IN ANHYDROUS AMMONIA GAS
ITO, T
NOZAKI, T
ISHIKAWA, H
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (09) : 2053 - 2057
[6] INFRARED STUDIES OF REACTIONS ON OXIDE SURFACES .5. LEWIS ACID SITES ON DEHYDROXYLATED SILICA
MORROW, BA
CODY, IA
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1976, 80 (18) : 1995 - 1998
[7] PHYSICAL AND CHEMICAL SOLUBILITY OF NITROGEN IN GLASS MELTS
MULFINGER, HO
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1966, 49 (09) : 462 - +
[8] PANTANO CG, 1984, ULTRASTRUCTURE PROCE
[9] INFRARED STUDY OF OH AND NH2 GROUPS ON SURFACE OF A DRY SILICA AEROGEL
PERI, JB
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1966, 70 (09) : 2937 - &