ELEMENTARY PROCESS OF THE THERMAL-DECOMPOSITION OF ALKYL GALLIUM

被引：37

作者：

OIKAWA, S

TSUDA, M

MORISHITA, M

MASHITA, M

KUNIYA, Y

机构：

[1] TOSHIBA CORP,TOSHIBA RES & DEV CTR,ELECTRON DEVICES LAB,SAIWAI KU,KAWASAKI 210,JAPAN

[2] CHUO UNIV,FAC SCI & ENGN,BUNKYO KU,TOKYO 112,JAPAN

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 91卷 / 04期

关键词：

D O I：

10.1016/0022-0248(88)90114-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：471 / 480

页数：10

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