SI IC-COMPATIBLE INDUCTORS AND LC PASSIVE FILTERS

被引:215
作者
NGUYEN, NM [1 ]
MEYER, RG [1 ]
机构
[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720
关键词
D O I
10.1109/4.58301
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Passive inductors and LC filters fabricated in standard Si IC technology are demonstrated. Q factors from 3 to 8 and inductors up to 10 nH in the gigahertz range have been realized. Measurements on a five-pole maximally flat low-pass filter give midband insertion loss and −3-dB bandwidth close to the nominal design values of 2.25 dB and 880 MHz. © 1990 IEEE
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页码:1028 / 1031
页数:4
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