REFRACTORY-METAL SILICIDE FORMATION BY ION-BEAM MIXING AND RAPID THERMAL ANNEALING

被引：26

作者：

KWONG, DL

MEYERS, DC

ALVI, NS

LI, LW

NORBECK, E

机构：

[1] UNIV IOWA,DEPT PHYS,IOWA CITY,IA 52242

[2] DELCO ELECTR,KOKOMO,IN 46902

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 07期

关键词：

D O I：

10.1063/1.96059

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：688 / 691

页数：4

共 20 条

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