WET ETCHING OF PROTON-EXCHANGED LITHIUM-NIOBATE - A NOVEL PROCESSING TECHNIQUE

A new and simple method to etch lithium niobate is reported. We have found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures.