ANALYSIS OF THE ELECTRON SWARM PARAMETERS BY USING FOURIER-TRANSFORMS OF THE BOLTZMANN-EQUATION

被引:16
作者
DATE, H
KONDO, K
YACHI, S
TAGASHIRA, H
机构
[1] HOKKAIDO UNIV,COLL MED TECHNOL,SAPPORO,HOKKAIDO 060,JAPAN
[2] ANAN COLL TECHNOL,DEPT ELECT ENGN,ANAN,TOKUSHIMA 774,JAPAN
[3] HOKKAIDO UNIV,DEPT ELECT ENGN,SAPPORO,HOKKAIDO 060,JAPAN
关键词
D O I
10.1088/0022-3727/25/9/008
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new method to calculate the electron swarm parameters by employing a Fourier transformed Boltzmann equation is presented in which the swarm parameters are derived from the dispersion relation of the equation. The method is applied to krypton and sulphur hexafluoride(SF6) gases. The results are compared with those obtained by conventional methods and the practical features of the present method are discussed. It is shown that the method is a reliable means to deduce the electron swarm parameters.
引用
收藏
页码:1330 / 1334
页数:5
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