AMORPHIZATION OF NIOBIUM LAYERS BY PHOSPHORUS ION-IMPLANTATION

被引:26
作者
LINKER, G
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词
D O I
10.1016/0167-5087(83)90907-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:969 / 974
页数:6
相关论文
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