HYDROCARBON PLASMA EMISSION AS A MEANS TO MONITOR PLASMA POLYMERIZATION

被引：7

作者：

BIEG, KW

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(81)90180-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：411 / 417

页数：7

共 9 条

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BELL, AT ;

SHEN, M .