共 11 条
[1]
BIRK M, 1963, EE922 U CAL LAWR RAD
[2]
DAVANZO D, 1982, IEEE T ELECTRON DEV, V29, P1051
[3]
Khokhlov R. V., 1961, SOV PHYS RADIOTECH E, V6, P917
[8]
METAL ON POLYMER ION-IMPLANTATION MASK
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (02)
:494-496