ATOMIC DIFFUSION IN THIN-FILM REACTIONS

被引:9
作者
GREER, AL
机构
[1] University of Cambridge, Department of Materials Science and Metallurgy, Cambridge, CB2 3QZ, Pembroke Street
来源
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1991年 / 134卷
关键词
D O I
10.1016/0921-5093(91)90971-O
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Amorphous interfacial reaction layers are widely found in metal-silicon and metal-metal thin film systems and may be significant in themselves or in controlling the selection of crystalline reaction products. Such layers show a marked asymmetry in the diffusivities of their component species. For early/late transition metal combinations it is suggested that the asymmetry leads to a loss of internal equilibrium in the amorphous phase during its formation. The implications of this loss for the thermodynamics and kinetics of amorphous phase growth are discussed.
引用
收藏
页码:1268 / 1273
页数:6
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