SOLID-STATE CAPACITIVE PRESSURE TRANSDUCERS

被引：43

作者：

KO, WH

机构：

[1] Western Reserve Univ, Cleveland, OH,, USA, Western Reserve Univ, Cleveland, OH, USA

来源：

SENSORS AND ACTUATORS | 1986年 / 10卷 / 3-4期

关键词：

The technical contibutlons of Mr Summto and Mr Yeh; the editorial assistance of MS L Du&k and Mrs J McNulty as well as general support of the staff m the Electronics Design Center; Case Western Reserve Unrverslty; 1s smcerely acknowledged The work 1s partially supported by NASA grant NAS-5-29423 and NIH grant NS-19174-04;

D O I：

10.1016/0250-6874(86)80052-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：303 / 320

页数：18

共 37 条

[1]

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[2]

BLASER EM, 1971, 24 ANN C ENG MED BIO, P211

[3]

CHAU HL, 1985, JUN TRANSD 85 PHIL, P174

[4]

CLARK SK, 1979, IEEE T ELECTRON DEV, V26, P1857

[5]

Fleming D. G., 1977, INDWELLING IMPLANTAB

[6]

FORBENIUS WD, 1973, IEEE T BIOMED ENG, V20, P312

[7]

FRYER TB, 1977, INDWELLING IMPLANTAB, P173

[8]

Fung C. D., 1985, MICROMACHINING MICRO

[9] MINIATURE CAPACITIVE PRESSURE TRANSDUCERS [J].

FUNG, CD ;

KO, WH .

SENSORS AND ACTUATORS, 1982, 2 (03) :321-326

[10]

GIELES AC, 1970, PHILIPS TECH REV, V33, P14

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