IMPROVED AQUEOUS ETCHANT FOR HIGH T(C) SUPERCONDUCTOR MATERIALS

被引：22

作者：

ASHBY, CIH ^{[1
]}

MARTENS, J ^{[1
]}

PLUT, TA ^{[1
]}

GINLEY, DS ^{[1
]}

PHILLIPS, JM ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 17期

关键词：

D O I：

10.1063/1.107065

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed an aqueous etchant suitable for producing feature sizes of 1-mu-m or less in YBa2Cu3O7 and TlBaCaCuO while not degrading high-frequency surface resistance. The 10%-300% increase in surface resistance previously seen in aqueous solutions is largely due to the presence of dissolved CO2; decarbonation of the water by bubbling N2 before and during etching can produce a better than 50% reduction in the surface-resistance degradation. Surface-resistance degradation can be further reduced by selecting the appropriate solution pH for ethylenediaminetetraacetic acid (EDTA)-based etchants. We have minimized increases in surface resistance to less than 5% following etching in decarbonated disodium EDTA solutions for both YBa2Cu3O7 and TlBaCaCuO superconductors. Similar improvements can be expected from decarbonation and pH control of other aqueous processing solutions.

引用

页码：2147 / 2149

页数：3

共 12 条

[1] SUBSTRATE STEP-EDGE YBA2CU3O7 RF SQUIDS [J].