SENSITIVITY AND ACCURACY OF CBED PATTERN-MATCHING

被引:53
作者
BIRD, DM
SAUNDERS, M
机构
[1] School of Physics, University of Bath, Bath
关键词
D O I
10.1016/0304-3991(92)90512-I
中图分类号
TH742 [显微镜];
学科分类号
摘要
When establishing the feasibility of matching experimental and theoretical convergent-beam electron diffraction (CBED) patterns to recover structure-factor information it is important to investigate the accuracy of the results obtained and the effects of random and systematic errors. The effects of counting noise in a digital data-collection system are studied, together with various sources of systematic error. The sensitivity of parts of the pattern to specific structure-factor parameters is analysed via the calculation of analytic gradients of the intensity with respect to those parameters. All calculations are based on diffraction at the [110] axis of GaP, using simulated CBED patterns as idealised "experimental" data. The results indicate that, provided care is taken to minimise the effects of systematic errors, low-order structure factors may be extracted from experimental data with an accuracy approaching 0.1%.
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页码:241 / 251
页数:11
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