FLOW-TUBE KINETICS OF GAS-PHASE CHEMICAL-VAPOR-DEPOSITION REACTIONS - TIN FROM TI(NME2)4 AND NH3

被引：27

作者：

WEILLER, BH

PARTIDO, BV

机构：

[1] Mechanics and Materials Technology Center, Aerospace Corporation, Los Angeles, California 90009-2957

来源：

CHEMISTRY OF MATERIALS | 1994年 / 6卷 / 03期

关键词：

D O I：

10.1021/cm00039a002

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

[No abstract available]

引用

页码：260 / 261

页数：2

共 22 条

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