SCANNING OPTICAL MICROSCOPY

被引：2

作者：

KINO, GS ^{[1
]}

机构：

[1] STANFORD UNIV,WW HANSEN LABS PHYS,STANFORD,CA 94305

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 06期

关键词：

D O I：

10.1116/1.585134

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Two types of scanning optical microscopes are described, the real-time scanning optical microscope and the Mirau correlation microscope. These microscopes give excellent depth definition of the order of 0.4-mu-m between half-power points, and can be used for optical cross sectioning. They are particularly useful for separate measurements of the top and bottom widths of trenches in photoresist at the low submicron level.

引用

页码：1652 / 1656

页数：5

共 6 条

[1]

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[2]

Davidson M., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V775, P233, DOI 10.1117/12.940433

[3] CONFOCAL SCANNING OPTICAL MICROSCOPY [J].

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[4] TANDEM-SCANNING REFLECTED-LIGHT MICROSCOPE [J].

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[5]

Wilson T, 1984, THEORY PRACTICE SCAN

[6] REAL-TIME CONFOCAL SCANNING OPTICAL MICROSCOPE [J].

XIAO, GQ ;

CORLE, TR ;

KINO, GS .

APPLIED PHYSICS LETTERS, 1988, 53 (08) :716-718

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