ANALYSIS OF A FLOWING SILANE DC DISCHARGE IN THE PRESENCE OF A HOT SURFACE

被引：21

作者：

LONGEWAY, PA

WEAKLIEM, HA

ESTES, RD

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 12期

关键词：

D O I：

10.1063/1.334827

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5499 / 5505

页数：7

共 15 条

[1]

CATALANO A, COMMUNICATION

[2]

CHAPMAN B, 1980, GLOW DISCHARGE PROCE, P116

[3] DISSOCIATIVE EXCITATION OF H-2 - SPECTRAL-LINE SHAPES AND ELECTRON-IMPACT CROSS-SECTIONS OF BALMER LINES [J].

FREUND, RS ;

SCHIAVONE, JA ;

BRADER, DF .

JOURNAL OF CHEMICAL PHYSICS, 1976, 64 (03) :1122-1127

[4]

HIROSE M, 1981, TETRAHEDRALLY BONDED, P10

[5] ARRHENIUS PARAMETERS FOR SILENE INSERTION REACTIONS [J].

JOHN, P ;

PURNELL, JH .

JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1973, 69 (08) :1455-1461

[6] ORIGIN OF EMITTING SPECIES IN THE PLASMA DEPOSITION OF A-SI-H ALLOYS [J].

KAMPAS, FJ ;

GRIFFITH, RW .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) :1285-1288

[7] MECHANISM OF THE DIRECT-CURRENT PLASMA DISCHARGE DECOMPOSITION OF DISILANE [J].

LONGEWAY, PA ;

WEAKLIEM, HA ;

ESTES, RD .

JOURNAL OF PHYSICAL CHEMISTRY, 1984, 88 (15) :3282-3287

[8]

LONGEWAY PA, 1983, J PHYS CHEM, V88, P743

[9] INVESTIGATION OF THE HYDROGEN AND IMPURITY CONTENTS OF AMORPHOUS-SILICON BY SECONDARY ION MASS-SPECTROMETRY [J].

MAGEE, C ;

CARLSON, DE .

SOLAR CELLS, 1980, 2 (04) :365-376

[10] 147-NM PHOTOLYSIS OF MONOSILANE [J].

PERKINS, GGA ;

AUSTIN, ER ;

LAMPE, FW .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1979, 101 (05) :1109-1115

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