GROWTH MODE OF (111) SURFACES OF DIAMOND CRYSTALS SYNTHESIZED BY HOT-FILAMENT CVD METHOD

被引:6
作者
HIRABAYASHI, K
KURIHARA, NI
机构
[1] Research Center, Canon Inc, Atsugi-shi, Kanagawa
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 10期
关键词
Crystal morphology; Layer-by-layer crystal growth; Temperature dependence; Triangular tile; Vapor-deposited diamond;
D O I
10.1143/JJAP.29.L1862
中图分类号
O59 [应用物理学];
学科分类号
摘要
The substate temperature dependence of the morphology and the fine structures on (111) surfaces of diamond crystals have been studied using a high-resolution scanning electron microscope to elucidate the mechanism of the crystal growth. A layer-by-layer crystal growth of the (111) surface is suggested from the fact that the (111) surface structures are the same in diamond crystals deposited at different temperatures in spite of the difference in the shapes of (111) surfaces. © 1990 IOP Publishing Ltd.
引用
收藏
页码:L1862 / L1865
页数:4
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