OPTICAL AND LANGMUIR PROBE INVESTIGATIONS OF EXCITATION TEMPERATURES IN A LOW-PRESSURE GLOW-DISCHARGE WITH VARIATIONS IN DISCHARGE GAS IDENTITY

被引：4

作者：

ANGSTADT, AD ^{[1
]}

WHELAN, J ^{[1
]}

HESS, KR ^{[1
]}

机构：

[1] FRANKLIN & MARSHALL COLL,DEPT CHEM,BOX 3003,LANCASTER,PA 17604

来源：

MICROCHEMICAL JOURNAL | 1993年 / 47卷 / 1-2期

关键词：

D O I：

10.1006/mchj.1993.1035

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In an effort to more fully understand the excitation and ionization mechanisms present in a low-pressure (0.3-3 Torr), low-current (0-5 mA), diode geometry glow discharge, preliminary studies of electron characteristics with variations in discharge pressure and fill gas identity were undertaken. For comparison, excitation temperatures were measured by both optical and Langmuir probe methods. Neither method showed electron excitation in the plasma to vary substantially with changes in discharge pressure or changes in discharge gas composition, including quenching with methane. © 1993 Academic Press. All rights reserved.

引用

页码：206 / 223

页数：18

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