SEGREGATED MICROSTRUCTURE IN SPUTTERED CO-CR FILM REVEALED BY SELECTIVE WET ETCHING

被引：84

作者：

MAEDA, Y

ASAHI, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 05期

关键词：

D O I：

10.1063/1.337992

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1972 / 1978

页数：7

共 27 条

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