HIGHLY ELECTRONEGATIVE METALLIC CONTACTS TO SEMICONDUCTORS USING POLYMERIC SULFUR NITRIDE

被引:22
作者
SCRANTON, RA [1 ]
MOONEY, JB [1 ]
MCCALDIN, JO [1 ]
MCGILL, TC [1 ]
MEAD, CA [1 ]
机构
[1] CALTECH,PASADENA,CA 91125
关键词
D O I
10.1063/1.88868
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:47 / 48
页数:2
相关论文
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