FABRICATION AND PROPERTIES OF A SI-BASED HIGH-SENSITIVITY MICROCALORIMETRIC GAS SENSOR

被引：41

作者：

ZANINI, M

VISSER, JH

RIMAI, L

SOLTIS, RE

KOVALCHUK, A

HOFFMAN, DW

LOGOTHETIS, EM

BONNE, U

BREWER, L

BYNUM, OW

RICHARD, MA

机构：

[1] HONEYWELL INC,CTR TECHNOL,BLOOMINGTON,MN 55420

[2] ADV SENSOR DEVICES,MT VIEW,CA 94043

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 48卷 / 03期

关键词：

GAS SENSORS; MICROMACHINED SENSORS; MICROCALORIMETRY; PLATINUM RESISTANCE THERMOMETERS;

D O I：

10.1016/0924-4247(95)01000-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A differential catalytic microcalorimeter has been fabricated using silicon micromachining techniques. The steady-state device response to different combustible gases was investigated in the laboratory as a function of concentration of the combustible species, oxygen level, and gas flow. The device output was found to be proportional to the concentration of the different combustible gases, while the relative sensitivity to different reactants depends on the specific catalyst used. This paper discusses the design issues and the fabrication process for maximizing the detection limit of the device.

引用

页码：187 / 192

页数：6