SCALABLE STAGNATION-FLOW REACTORS FOR UNIFORM MATERIALS DEPOSITION - APPLICATION TO COMBUSTION SYNTHESIS OF DIAMOND

被引：25

作者：

MCCARTY, KF

MEEKS, E

KEE, RJ

LUTZ, AE

机构：

[1] Sandia National Laboratories/California, Livermore

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 11期

关键词：

D O I：

10.1063/1.109668

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe two inherently scaleable geometries for chemical-vapor-deposition and heat-transfer processes that are based on stagnation flows. The ''coflow'' and ''trumpet-bell'' designs result in radially uniform fluxes to surfaces and they optimize the use of reagents. Using a trumpet-bell burner, we have grown uniform films of diamond from a substrate-stabilized flat flame of C2H2/H-2/O2.

引用

页码：1498 / 1500

页数：3

共 12 条

[1]

COLTRIN ME, IN PRESS J APPL PHYS

[2]

COOPER JA, 1990, P SOC PHOTO-OPT INS, V1325, P41

[3] DIAMOND SYNTHESIS IN A LOW-PRESSURE FLAT FLAME [J].