HIGH-TC YB-BA-CU-O THIN-FILMS DEPOSITED ON SINTERED YSZ SUBSTRATES BY SPUTTERING

被引：48

作者：

KAWASAKI, M

NAGATA, S

SATO, Y

FUNABASHI, M

HASEGAWA, T

KISHIO, K

KITAZAWA, K

FUEKI, K

KOINUMA, H

机构：

[1] Univ of Tokyo, Tokyo, Jpn, Univ of Tokyo, Tokyo, Jpn

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1987年 / 26卷 / 05期

关键词：

CERAMIC MATERIALS - SPUTTERING - X-RAYS - Diffraction - YTTERBIUM COMPOUNDS - Thin Films;

D O I：

10.1143/JJAP.26.L738

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin films of superconductors Yb-Ba-Cu-O were prepared by 50 Hz ac sputtering technique. The critical temperatures for onset and zero resistivity were 93 K and 66 K, respectively. The metal compositions and crystal structures of the films were controlled by varying such preparation conditions as sputtering gas, target composition, and substrate temperature and their relations with superconductivity were investigated.

引用

页码：L738 / L740

页数：3