ION-BEAM MIXING OF ALUMINUM FILMS ON FUSED SIO2

被引：6

作者：

EROLA, M

KEINONEN, J

WHITLOW, HJ

ANTTILA, A

HAUTALA, M

机构：

来源：

THIN SOLID FILMS | 1984年 / 115卷 / 02期

关键词：

D O I：

10.1016/0040-6090(84)90513-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：125 / 134

页数：10

共 16 条

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[10] LOCAL DENSITY CHANGE OF A METAL BACKING DUE TO IMPLANTED IONS - EFFECT ON NUCLEAR LIFETIMES OBTAINED WITH THE DSA METHOD [J].

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