PHOTOEMISSION-STUDY OF EVAPORATED CUINS(2) THIN-FILMS .1. SURFACE STOICHIOMETRY AND PHASE SEGREGATION

被引:52
作者
SCHEER, R
LEWERENZ, HJ
机构
[1] Hahn-Meitner Institut, Bereich Photochemische Energieumwandlung, D-1000, Berlin 39, Postfach 39 01 28
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 01期
关键词
D O I
10.1116/1.578857
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The surfaces of evaporated CuInS2 films were investigated by photoelectron spectroscopy (XPS) with respect to stoichiometry dependent features. The surface composition of In-rich CuInS2 films drastically exceeds the respective bulk value determined by energy dispersive x-ray fluorescence and displays the formation of an In-rich surface layer with a cation ratio of In/(In+Cu)=0.75(2). Sputter profiles obtained by Auger electron spectroscopy confirm the effect of In enrichment and Cu depletion on the surface. The altered surface region is estimated to extend approximately 0.1 mu m into the film. Films with a Cu-rich bulk composition also exhibited In-rich surfaces, but in addition the segregation of a CuS phase is concluded from XPS investigations. The interrelation of these observations is discussed using simple model considerations.
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页码:51 / 55
页数:5
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