LAYER-BY-LAYER DESIGN METHOD FOR SOFT-X-RAY MULTILAYERS

被引：75

作者：

YAMAMOTO, M

NAMIOKA, T

机构：

[1] Research Institute for Scientific Measurements, Tohoku University, Sendai, 980, 2-1-1 Katahira, Aoba-ku

[2] Optical Research Section, NASA Goddard Space Flight Center, Greenbelt, MD, 20771

来源：

APPLIED OPTICS | 1992年 / 31卷 / 10期

关键词：

X-RAYS; MULTILAYER MIRROR; THIN FILMS;

D O I：

10.1364/AO.31.001622

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new design method effective for a nontransparent system has been developed for soft-x-ray multilayers with the aid of graphic representation of the complex amplitude reflectance in a Gaussian plane. The method provides an effective means of attaining the absolute maximum reflectance on a layer-by-layer basis and also gives clear insight into the evolution of the amplitude reflectance on a multilayer as it builds up. An optical criterion is derived for the selection of a proper pair of materials needed for designing a high-reflectance multilayer. Some examples are given to illustrate the usefulness of this design method.

引用

页码：1622 / 1630

页数：9

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