COORDINATION STATE OF MAGNESIUM-IONS IN RF-SPUTTERED AMORPHOUS FILMS IN THE SYSTEM MGO-SIO2

被引：27

作者：

HANADA, T ^{[1
]}

SOGA, N ^{[1
]}

TACHIBANA, T ^{[1
]}

机构：

[1] KYOTO UNIV,FAC ENGN,DEPT IND CHEM,KYOTO 606,JAPAN

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1988年 / 105卷 / 1-2期

关键词：

D O I：

10.1016/0022-3093(88)90335-3

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：39 / 44

页数：6

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