ION-IMPLANTATION INTO STRAINED-LAYER SUPERLATTICES

被引：17

作者：

PICRAUX, ST

ARNOLD, GW

MYERS, DR

DAWSON, LR

BIEFELD, RM

FRITZ, IJ

ZIPPERIAN, TE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90598-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：453 / 460

页数：8

共 14 条

[1] STRUCTURAL INTEGRITY OF ION-IMPLANTED IN0.2GA0.8AS GAAS STRAINED-LAYER SUPERLATTICE [J].

ARNOLD, GW ;

PICRAUX, ST ;

PEERCY, PS ;

MYERS, DR ;

DAWSON, LR .

APPLIED PHYSICS LETTERS, 1984, 45 (04) :382-384

[2] INDEPENDENTLY VARIABLE BAND-GAPS AND LATTICE-CONSTANTS IN GAASP STRAINED-LAYER SUPER-LATTICES [J].

BIEFELD, RM ;

GOURLEY, PL ;

FRITZ, IJ ;

OSBOURN, GC .

APPLIED PHYSICS LETTERS, 1983, 43 (08) :759-761

[3] DISORDER OF AN ALAS-GAAS SUPER-LATTICE BY SILICON IMPLANTATION [J].

COLEMAN, JJ ;

DAPKUS, PD ;

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CAMRAS, MD ;

HOLONYAK, N .

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[4] ELECTRICAL PROFILES FROM ZINC IMPLANTED GAAS [J].

KULAR, SS ;

SEALY, BJ ;

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ELECTRONICS LETTERS, 1978, 14 (01) :2-4

[5] DISORDER OF AN INXGA1-XAS-GAAS SUPER-LATTICE BY ZN DIFFUSION [J].

LAIDIG, WD ;

LEE, JW ;

CHIANG, PK ;

SIMPSON, LW ;

BEDAIR, SM .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6382-6384

[6] ELECTRICAL PROFILES OF MAGNESIUM-ION-IMPLANTED GAP [J].

LANK, DJ ;

DOBBS, BC ;

PARK, YS .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (03) :1318-1324

[7] DEFECTS IN EPITAXIAL MULTILAYERS .1. MISFIT DISLOCATIONS [J].

MATTHEWS, JW ;

BLAKESLEE, AE .

JOURNAL OF CRYSTAL GROWTH, 1974, 27 (DEC) :118-125

[8] ELECTRICAL PROFILING AND OPTICAL ACTIVATION STUDIES OF BE-IMPLANTED GAAS [J].

MCLEVIGE, WV ;

HELIX, MJ ;

VAIDYANATHAN, KV ;

STREETMAN, BG .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3342-3346

[9] BE-IMPLANTATION DOPING OF GAASXP1-X/GAP STRAINED-LAYER SUPERLATTICES [J].

MYERS, DR ;

BIEFELD, RM ;

FRITZ, IJ ;

PICRAUX, ST ;

ZIPPERIAN, TE .

APPLIED PHYSICS LETTERS, 1984, 44 (11) :1052-1054

[10]

MYERS DR, 1984, ELECTRON DEVICE LETT, V5, P326

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