A SILICON MICROVALVE WITH COMBINED ELECTROMAGNETIC/ELECTROSTATIC ACTUATION

被引：46

作者：

BOSCH, D

HEIMHOFER, B

MUCK, G

SEIDEL, H

THUMSER, U

WELSER, W

机构：

[1] Deutsche Aerospace AG, D-8000 Munich 80

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷

关键词：

D O I：

10.1016/0924-4247(93)80116-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the design, fabrication and performance of a silicon microvalve for small gas flows. It consists of two micromachined components which are bonded together. One part contains the gas flow inlet, the other part a deflectable silicon membrane. This membrane may be activated by a combination of electromagnetic and electrostatic forces. This principle is especially useful for minimizing the power consumption. The main experimental results are as follows: The. maximum pressure against which the valve can fully operate is 160 mbar. With this pressure, a flow of up to 3 ml/min can be controlled. Typically, current pulses of 200 mA and voltage amplitudes of 30 V are applied for electromagnetic and electrostatic actuation, respectively. The switching time is below 0.4 ms.

引用

页码：684 / 692

页数：9

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SENSORS AND ACTUATORS A-PHYSICAL, 1990, 24 (01) :47-53

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