NEW HIGH-EFFICIENCY QUASI-CONTINUOUS OPERATION OF A KRF(B-]X) EXCIMER LAMP EXCITED BY MICROWAVE-DISCHARGE

被引：52

作者：

KUMAGAI, H

OBARA, M

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 26期

关键词：

D O I：

10.1063/1.101039

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2619 / 2621

页数：3

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