CHARACTERIZATION OF RF-SPUTTERED BATIO3 THIN-FILMS USING A LIQUID ELECTROLYTE FOR THE TOP CONTACT

被引：29

作者：

ROSE, TL

KELLIHER, EM

SCOVILLE, AN

STONE, SE

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 10期

关键词：

D O I：

10.1063/1.332923

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3706 / 3714

页数：9

共 28 条

[1]

Feuersanger A. E., 1969, THIN FILM DIELECTRIC, P209

[2] PREPARATION AND PROPERTIES OF THIN BARIUM TITANATE FILMS [J].

FEUERSANGER, AE ;

HAGENLOCHER, AK ;

SOLOMON, AL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (12) :1387-1391

[3]

GLAISTER RM, 1960, P PHYS SOC, V76, P76

[4] THEORY AND DESIGN OF CAPACITOR ELECTRODES FOR CHRONIC STIMULATION [J].

GUYTON, DL ;

HAMBRECH.FT .

MEDICAL & BIOLOGICAL ENGINEERING, 1974, 12 (05) :613-619

[5] MINIATURE IMPLANTABLE TANTALUM TANTALUM OXIDE STIMULATING ELECTRODES [J].

LERNER, H ;

ZAHRADNIK, RT ;

BUCHBINDER, M .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1982, 29 (04) :290-292

[6]

Loeb G. E., 1982, BIOCOMPATIBILITY CLI, V2, P123

[7]

MASSON S, 1970, JAP J PHYS SOC S, V28, P421

[8] CHARACTERIZATION OF AMORPHOUS BARIUM-TITANATE FILMS PREPARED BY RF SPUTTERING [J].

MCCLURE, DJ ;

CROWE, JR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :311-314

[9] THE A-C PROPERTIES OF TANTALUM SOLID ELECTROLYTIC CAPACITORS [J].

MCLEAN, DA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (01) :48-56

[10]

MULLER EM, 1963, ELECTROCHEM TECHNOL, V1, P158

← 1 2 3 →