APPLICATION OF GLOW-DISCHARGE OPTICAL-EMISSION SPECTROSCOPY (GDOES) TO THE ANALYSIS OF PVD-LAYERS AND CVD-LAYERS

被引：10

作者：

HOFFMANN, V

机构：

[1] Institut für Festkörper- und Werkstofforschung Dresden e. V. (IFW), Dresden

来源：

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1993年 / 346卷 / 1-3期

关键词：

D O I：

10.1007/BF00321405

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

PVD- and CVD-layers were analysed by GDOES using a homemade laboratory device and the commercial Spectrumat 1000. The presented examples demonstrate the many possibilities of GDOES and give information about the further development of this analytical technique.

引用

页码：165 / 168

页数：4

共 5 条

[1] GLOW-DISCHARGE OPTICAL-EMISSION SPECTROSCOPY AS APPLIED TO THE ANALYSIS OF POWDERED MATERIALS [J].