INTERACTION OF LOW-ENERGY ELECTRONS WITH THE ELECTRON-BEAM RESIST POLY(BUTENE-1-SULFONE)

被引：8

作者：

ASHLEY, JC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 09期

关键词：

D O I：

10.1063/1.340141

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4620 / 4625

页数：6

共 28 条

[11] ELECTRON-IRRADIATION OF POLY(OLEFIN SULFONES) - APPLICATION TO ELECTRON-BEAM RESISTS [J].

BOWDEN, MJ ;

THOMPSON, LF .

JOURNAL OF APPLIED POLYMER SCIENCE, 1973, 17 (10) :3211-3221

[12]

DAVYDOV AS, 1968, QUANTUM MECHANICS, pCH11

[13] SYSTEMATICS OF MOMENTS OF DIPOLE OSCILLATOR-STRENGTH DISTRIBUTIONS FOR ATOMS OF 1ST AND 2ND ROW [J].

DEHMER, JL ;

INOKUTI, M ;

SAXON, RP .

PHYSICAL REVIEW A, 1975, 12 (01) :102-121

[14] DIELECTRIC FUNCTION OF A MODEL INSULATOR [J].

FRY, JL .

PHYSICAL REVIEW, 1969, 179 (03) :892-+

[15] ION-BEAM EXPOSURE CHARACTERISTICS OF RESISTS - EXPERIMENTAL RESULTS [J].

HALL, TM ;

WAGNER, A ;

THOMPSON, LF .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :3997-4010

[16] OPTICAL-PROPERTIES OF POLYSTYRENE FROM NEAR-INFRARED TO X-RAY REGION AND CONVERGENCE OF OPTICAL SUM-RULES [J].

INAGAKI, T ;

ARAKAWA, ET ;

HAMM, RN ;

WILLIAMS, MW .

PHYSICAL REVIEW B, 1977, 15 (06) :3243-3253

[17]

INOKUTI M, COMMUNICATION

[18]

LINDHARD J, 1954, MAT FYS MEDD DAN VID, V28, P1

[19]

MCGUIRE EJ, 1971, SCRR70406 SAND RES R

[20]

MCGUIRE EJ, COMMUNICATION

← 1 2 3 →