INTERACTION OF LOW-ENERGY ELECTRONS WITH THE ELECTRON-BEAM RESIST POLY(BUTENE-1-SULFONE)

被引：8

作者：

ASHLEY, JC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 09期

关键词：

D O I：

10.1063/1.340141

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4620 / 4625

页数：6

共 28 条

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