IMPERFECTIONS ON THE CHEMICALLY PREPARED, IDEALLY H-TERMINATED SI(111)-(1X1) SURFACES

被引:37
作者
JAKOB, P [1 ]
CHABAL, YJ [1 ]
RAGHAVACHARI, K [1 ]
DUMAS, P [1 ]
CHRISTMAN, SB [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1016/0039-6028(93)90436-N
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A defect-induced feature in the Si-H stretch spectrum of chemically prepared H/Si(111)-(1 x 1) surfaces is studied with infrared absorption spectroscopy. These ideally H-terminated surfaces are characterized by a sharp Si-H stretch absorption band at approximately 2084 cm-1 , polarized perpendicular to the surface. In addition, a weak feature is observed approximately 0.9 cm-1 higher in frequency, even on the best surfaces. Its linewidth is very small (approximately 0.1 cm-1) and independent of that of the main Si-H stretch mode. This spectral feature is attributed to monohydrides located next to a defect, either structural (e.g. vacancy) or chemical (e.g. oxygen). Within this interpretation, model calculations indicate that the related defect density on the best samples ranges between 0.05% and 0.1% of a monolayer.
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页码:251 / 258
页数:8
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