MECHANICAL AND THERMOPHYSICAL PROPERTIES OF DIAMOND-LIKE CARBON (DLC) FILMS WITH DIFFERENT SP(3)/SP(2) RATIOS

被引:27
作者
DEMICHELIS, F
PIRRI, CF
TAGLIAFERRO, A
BENEDETTO, G
BOARINO, L
SPAGNOLO, R
DUNLOP, E
HAUPT, J
GISSLER, W
机构
[1] COMMISS EUROPEAN COMMUNITIES, JOINT RES CTR, INST ADV MAT, I-21020 ISPRA, ITALY
[2] IEN GALILEO FERRARIS, I-10135 TURIN, ITALY
关键词
D O I
10.1016/0925-9635(93)90245-W
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper we present the results of a study of the mechanical and thermal properties of hydrogenated amorphous carbon (a-C:H) films. The hardness and Young's modulus of the films show a rough dependence on the sp3/sp2 ratio, while the thermal expansion coefficient of the films is a definite function of the sp3/sp2 ratio. In fact, it is shown that the thermal expansion coefficient at low temperature (below 130 K) increases with decreasing Sp3/Sp2 ratio. In turn, the thermal conductivity depends on the number of Sp3 sites, although further investigations are needed to detail this dependence. The mechanical properties are indirectly correlated with the thermal ones, since both are sensitive to the sp3 amount.
引用
收藏
页码:890 / 892
页数:3
相关论文
共 10 条
  • [1] AMATO G, IN PRESS MRS S P, V270
  • [2] ELECTRICAL-CONDUCTIVITY OF AMORPHOUS-CARBON AND AMORPHOUS HYDROGENATED CARBON
    DASGUPTA, D
    DEMICHELIS, F
    TAGLIAFERRO, A
    [J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1991, 63 (06): : 1255 - 1266
  • [3] DEMICCHELIS F, IN PRES MRS S P, V270
  • [4] DISCHLER B, 1989, EMRS S P, V17, P189
  • [5] HARDNESS AND YOUNG MODULUS OF DIAMOND-LIKE CARBON-FILMS PREPARED BY ION-BEAM METHODS
    DUNLOP, E
    HAUPT, J
    SCHMIDT, K
    GISSLER, W
    [J]. DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) : 644 - 649
  • [6] MECHANICAL-PROPERTIES OF A-C-H FILMS PREPARED BY PLASMA DECOMPOSITION OF C2H2
    JIANG, X
    REICHELT, K
    STRITZKER, B
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 68 (03) : 1018 - 1022
  • [7] THERMAL-WAVE DETECTION AND THIN-FILM THICKNESS MEASUREMENTS WITH LASER-BEAM DEFLECTION
    OPSAL, J
    ROSENCWAIG, A
    WILLENBORG, DL
    [J]. APPLIED OPTICS, 1983, 22 (20): : 3169 - 3176
  • [8] MECHANICAL-PROPERTIES AND COORDINATIONS OF AMORPHOUS CARBONS
    ROBERTSON, J
    [J]. PHYSICAL REVIEW LETTERS, 1992, 68 (02) : 220 - 223
  • [9] ATOMIC CONSTRAINT IN HYDROGENATED DIAMOND-LIKE CARBON
    TAMOR, MA
    VASSELL, WC
    CARDUNER, KR
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (06) : 592 - 594
  • [10] THE DEPOSITION AND STUDY OF HARD CARBON-FILMS
    ZOU, JW
    REICHELT, K
    SCHMIDT, K
    DISCHLER, B
    [J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (10) : 3914 - 3918