EXAMINATION OF THIN-FILMS IN THE ZRO2-SIO2 SYSTEM BY TRANSMISSION ELECTRON-MICROSCOPY AND X-RAY-DIFFRACTION TECHNIQUES

被引：26

作者：

FARABAUGH, EN

FELDMAN, A

SUN, J

SUN, YN

机构：

[1] SHANGHAI INST CERAM,SHANGHAI,PEOPLES R CHINA

[2] LANZHOU INST PHYS,LANZHOU,PEOPLES R CHINA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574544

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1671 / 1674

页数：4

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