CORRELATION MICROSCOPE

被引：43

作者：

CHIM, SSC

KINO, GS

机构：

[1] Edward L. Ginzton Laboratory, W. W. Hansen Laboratories of Physics, Stanford University, Stanford, CA

来源：

OPTICS LETTERS | 1990年 / 15卷 / 10期

关键词：

D O I：

10.1364/OL.15.000579

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter, and we have developed a method to extract the amplitude and phase information of the reflected signal from a sample located at the microscope object plane. An imaging theory for the interference microscope has been derived, which predicts accurately both the transverse response at a sharp edge and the range response to a perfect plane reflector. © 1990 Optical Society of America.

引用

页码：579 / 581

页数：3