TOLERANCES IN MICROLENS FABRICATION BY MULTILEVEL ETCHING AND MASS-TRANSPORT SMOOTHING

被引：9

作者：

LIAU, ZL ^{[1
]}

NAM, DW ^{[1
]}

WAARTS, RG ^{[1
]}

机构：

[1] SDL INC, SAN JOSE, CA 95134 USA

来源：

APPLIED OPTICS | 1994年 / 33卷 / 31期

关键词：

MICROLENS; MASS-TRANSPORT SMOOTHING; LENS EFFICIENCY; FABRICATION TOLERANCE;

D O I：

10.1364/AO.33.007371

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A method is developed for the quantitative assessment of microlens deficiencies caused by inaccuracies in the multistep mesa fabrication or by incomplete mass-transport smoothing. Analytical expressions are obtained and tolerable imperfections are deduced for the practical effort-saving fabrication of high-performance micro-optical elements.

引用

收藏

页码：7371 / 7376

页数：6

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